Produk

Carbide Solid Solid

Vetek semikonduktor solicon karbida yaiku komponen keramik penting ing peralatan plasma etching, karbida soliconCvd silikon karbida) bagean ing peralatan etching kalebuFokus Rings, Gas Showerheas, dering, cincin pinggir, lsp. Amarga réaktivitas silikon karbida lan cvd silikon) menyang klorin - lan bahan sing cocog karo cvd, minangka bahan sing cocog karo cvd, minangka bahan sing cocog kanggo peralatan sing cocog karo cemara lan komponen liyane.


Contone, cincin fokus minangka bagean penting sing diselehake ing njaba wafer lan langsung kontak karo wafer, kanthi ngetrapake voltase menyang cincin kasebut, kanthi fokus ing plasma kanggo nambah keseragaman kanggo ngolah pangolahan. Dering fokus tradisional digawe saka silikon utawaKuarsa, Silikon konduktivitas minangka bahan cincin fokus sing umum, meh cedhak karo tumindak wafers silikon, nanging kekurangan tahan serangga fluorine, bakal ana efisiensi produksi serius.


SOliid Fokus FokusPrinsip kerja

Working Principle of Solid SiC Focus Ring


Perbandingan ring basis Adhedhasar lan cvd fokus CRD:

Perbandingan karo Dering fokus ing Adhedhasar lan CVD Fokus Cincin
Item Lan CVD SIC
Kapadhetan (g / cm3) 2.33 3.21
Band Gap (EV) 1.12 2.3
Konduktivitas termal (w / cm ℃) 1.5 5
Cte (x10-6/ ℃) 2.6 4
Modulus elastis (GPA) 150 440
Hardness (GPA) 11.4 24.5
Rintangan kanggo nyandhang lan korosi Miskin Banget


Vetek Somiconduktor nawakake karbida solor canggih canggih (CVD karbohicon karbida) kaya SIC Fokus dering SIC kanggo peralatan semikonduktor. Silikon solid kita fokus ing cincin tradisional Outperform ing babagan kekuatan mekanik, resistensi kimia, kekurangan suhu, lan tahan ulang Etate-iron.


Fitur utama saka cincin fokus sik kalebu:

Kapadhetan sing dhuwur kanggo tarif etching suda.

Penebat banget karo bandgap dhuwur.

Konduktivitas termal lan koefisien kurang ekspansi termal.

Rintangan lan kelainan mekanik sing unggul.

Hardness, nyandhang resistensi, lan resistensi karat.

Diprodhuksi nggunakakePLASMA-Meningkat Dipendheksi kimia (PECVD)Teknik, cincin fokus sik kita ketemu panjaluk proses etching ing pabrik semikonduktor. Dheweke dirancang kanggo nahan daya lan tenaga plasma sing luwih dhuwur, khusus ingPlasma sing bisa digayuh (CCP)Lanstem.

Cincin fokus vetek semikonduktor menehi kinerja lan linuwih sing luar biasa ing manufaktur piranti semikonduktor. Pilih komponen SIC kanggo kualitas lan efisiensi.


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Solid SiC Gas Shower Kepala

Solid SiC Gas Shower Kepala

Solid SiC Gas Shower Head main peran utama kanggo nggawe seragam gas ing proses CVD, saéngga njamin pemanasan seragam saka substrat. VeTek Semiconductor wis melu banget ing bidang piranti SiC sing padhet sajrone pirang-pirang taun lan bisa nyedhiyakake Kepala Pancuran Gas SiC Solid sing disesuaikan. Ora ketompo apa syarat sampeyan, kita ngarepake pitakon sampeyan.
Penepapan uap kimia Proses proses SIC Edge Sik

Penepapan uap kimia Proses proses SIC Edge Sik

Vetek Semiconduktor mesthi setya kanggo riset lan pangembangan lan pabrik bahan semikonduktor maju. Dina iki, Vetek Somiconductor wis nggawe kemajuan sing apik ing pemendharan uap kimia, proses produk ring solid SIC lan bisa nyedhiyani para pelanggan kanthi cincin sik. Cincin sis solid nyedhiyakake mobilitas etching sing luwih apik lan posisi wafer sing tepat nalika digunakake kanthi asil electrostatic, njamin asil etching sing konsisten lan dipercaya. Nggolek priksaan lan dadi mitra jangka panjang saben liyane.
Dering SIC Etching Fokus

Dering SIC Etching Fokus

Solid SiC Etching Focusing Ring minangka salah sawijining komponen inti saka proses etsa wafer, sing nduweni peran kanggo ndandani wafer, fokus plasma lan ningkatake keseragaman etsa wafer. Minangka produsen Cincin Fokus SiC sing misuwur ing China, VeTek Semiconductor duwe teknologi canggih lan proses sing diwasa, lan nggawe Dering Fokus Etching Solid SiC sing nyukupi kabutuhan pelanggan pungkasan miturut syarat pelanggan. Kita ngarepake pitakon sampeyan lan dadi mitra jangka panjang saben liyane.

Veteksemicon solid silicon carbide is the ideal procurement material for high-temperature, high-strength, and corrosion-resistant components used in semiconductor and industrial applications. As a fully dense, monolithic ceramic, solid silicon carbide (SiC) offers unmatched mechanical rigidity, extreme thermal conductivity, and exceptional chemical durability in harsh processing environments. Veteksemicon’s solid SiC is specifically developed for critical structural applications such as SiC wafer carriers, cantilever paddles, susceptors, and showerheads in semiconductor equipment.


Manufactured through pressureless sintering or reaction bonding, our solid silicon carbide parts exhibit excellent wear resistance and thermal shock performance, even at temperatures above 1600°C. These properties make solid SiC the preferred material for CVD/PECVD systems, diffusion furnaces, and oxidation furnaces, where long-term thermal stability and purity are essential.


Veteksemicon also offers custom-machined SiC parts, enabling tight dimensional tolerances, high surface quality, and application-specific geometries. Additionally, solid SiC is non-reactive in both oxidizing and reducing atmospheres, enhancing its suitability for plasma, vacuum, and corrosive gas environments.


To explore our full range of solid silicon carbide components and discuss your project specifications, please visit the Veteksemicon product detail page or contact us for technical support and quotations.


Minangka Produsen lan supplier profesional Carbide Solid Solid ing China, kita duwe pabrik dhewe. Apa sampeyan mbutuhake layanan khusus kanggo nyukupi kabutuhan wilayah tartamtu utawa pengin tuku sing digawe lan awet sing digawe ing China, sampeyan bisa ninggalake pesen.
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