Produk

Carbide Solid Solid

Vetek semikonduktor solicon karbida yaiku komponen keramik penting ing peralatan plasma etching, karbida soliconCvd silikon karbida) bagean ing peralatan etching kalebuFokus Rings, Gas Showerheas, dering, cincin pinggir, lsp. Amarga réaktivitas silikon karbida lan cvd silikon) menyang klorin - lan bahan sing cocog karo cvd, minangka bahan sing cocog karo cvd, minangka bahan sing cocog kanggo peralatan sing cocog karo cemara lan komponen liyane.


Contone, cincin fokus minangka bagean penting sing diselehake ing njaba wafer lan langsung kontak karo wafer, kanthi ngetrapake voltase menyang cincin kasebut, kanthi fokus ing plasma kanggo nambah keseragaman kanggo ngolah pangolahan. Dering fokus tradisional digawe saka silikon utawaKuarsa, Silikon konduktivitas minangka bahan cincin fokus sing umum, meh cedhak karo tumindak wafers silikon, nanging kekurangan tahan serangga fluorine, bakal ana efisiensi produksi serius.


SOliid Fokus FokusPrinsip kerja

Working Principle of Solid SiC Focus Ring


Perbandingan ring basis Adhedhasar lan cvd fokus CRD:

Perbandingan karo Dering fokus ing Adhedhasar lan CVD Fokus Cincin
Item Lan CVD SIC
Kapadhetan (g / cm3) 2.33 3.21
Band Gap (EV) 1.12 2.3
Konduktivitas termal (w / cm ℃) 1.5 5
Cte (x10-6/ ℃) 2.6 4
Modulus elastis (GPA) 150 440
Hardness (GPA) 11.4 24.5
Rintangan kanggo nyandhang lan korosi Miskin Banget


Vetek Somiconduktor nawakake karbida solor canggih canggih (CVD karbohicon karbida) kaya SIC Fokus dering SIC kanggo peralatan semikonduktor. Silikon solid kita fokus ing cincin tradisional Outperform ing babagan kekuatan mekanik, resistensi kimia, kekurangan suhu, lan tahan ulang Etate-iron.


Fitur utama saka cincin fokus sik kalebu:

Kapadhetan sing dhuwur kanggo tarif etching suda.

Penebat banget karo bandgap dhuwur.

Konduktivitas termal lan koefisien kurang ekspansi termal.

Rintangan lan kelainan mekanik sing unggul.

Hardness, nyandhang resistensi, lan resistensi karat.

Diprodhuksi nggunakakePLASMA-Meningkat Dipendheksi kimia (PECVD)Teknik, cincin fokus sik kita ketemu panjaluk proses etching ing pabrik semikonduktor. Dheweke dirancang kanggo nahan daya lan tenaga plasma sing luwih dhuwur, khusus ingPlasma sing bisa digayuh (CCP)Lanstem.

Cincin fokus vetek semikonduktor menehi kinerja lan linuwih sing luar biasa ing manufaktur piranti semikonduktor. Pilih komponen SIC kanggo kualitas lan efisiensi.


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Kepala Pancuran CVD Coated CVD

Kepala Pancuran CVD Coated CVD

Siklus Coated Siklus Grafite saka VetekSemicon minangka komponen kinerja dhuwur sing dirancang kanggo pemampihan vapon Chemical (CVD). Diprodhuksi saka grafit murni lan dilindhungi karo lapisan uap kimia (Sic) Carbide (SIC), sirah mandheg, stabilitas termal, lan tahan kanggo gas proses kegrosif. Ngarepake konsultasi luwih.
SIC Edge Cincin

SIC Edge Cincin

VetekSemicon Sik Edge Rings, Dirancang khusus kanggo Peralatan Etch Gedhung Semikonduktor, fitur Rintangan Korosi Korosi lan Stabilitas Termal, signifikan nambah ngasilake wafer
Bahan murni CVD materi CVD

Bahan murni CVD materi CVD

Bahan mentah CVD SIC sing disiapake dening CVD minangka bahan sumber paling apik kanggo wutah kristal karbida kanthi transportasi uap fisik. Kapadhetan bahan mentah CVD sic sing diwenehake dening para dokter semikonduktor luwih dhuwur tinimbang partikel cilik sing dibentuk dening gasis spontan kanggo lan c-sing ngemot gas, lan ora mbutuhake tungku sing darmabakti, lan ora entuk tingkat penguapan sing meh terus-terusan. Bisa tuwuh kristal tunggal sing apik banget. Ngarepake priksaan sampeyan.
Carrier wafer SIP sing padhet

Carrier wafer SIP sing padhet

Vetek Semikonduktor Carrier SIC-Semerduktor dirancang kanggo lingkungan suhu sing dhuwur lan lingkungan tahan karat ing semikonxial ampitoxial lan cocog kanggo kabeh jinis proses pabrik wafer kanthi syarat kesucian sing akeh. Vetek Semiconduktor minangka supplier operator wafer utama ing China lan ngarepake dadi mitra jangka panjang ing industri semikonduktor.
Kepala Pancuran Bunder Siklus Siklus

Kepala Pancuran Bunder Siklus Siklus

Vetek Somiconductor minangka produsen peralatan semikonduktor utama ing China lan pabrikan profesional lan supplier supplier of SCP-shower shower endhese. Bentuk semak disk kita digunakake ing produksi pemetangan film tipis kayata proses CVD kanggo njamin untu bensin reaksi seragam lan minangka salah sawijining komponen inti tungku CVD.
SIC SEALE SEAL

SIC SEALE SEAL

Minangka produsen produk SIC supades SIC supade ing China. Vetek semiconducto SIC Sealing Part yaiku komponen pengapuran kinerja dhuwur sing digunakake ing pangolahan semikonduktor lan suhu sing dhuwur banget lan proses tekanan tinggi. Sugeng rawuh konsultasi luwih lengkap.

Veteksemicon solid silicon carbide is the ideal procurement material for high-temperature, high-strength, and corrosion-resistant components used in semiconductor and industrial applications. As a fully dense, monolithic ceramic, solid silicon carbide (SiC) offers unmatched mechanical rigidity, extreme thermal conductivity, and exceptional chemical durability in harsh processing environments. Veteksemicon’s solid SiC is specifically developed for critical structural applications such as SiC wafer carriers, cantilever paddles, susceptors, and showerheads in semiconductor equipment.


Manufactured through pressureless sintering or reaction bonding, our solid silicon carbide parts exhibit excellent wear resistance and thermal shock performance, even at temperatures above 1600°C. These properties make solid SiC the preferred material for CVD/PECVD systems, diffusion furnaces, and oxidation furnaces, where long-term thermal stability and purity are essential.


Veteksemicon also offers custom-machined SiC parts, enabling tight dimensional tolerances, high surface quality, and application-specific geometries. Additionally, solid SiC is non-reactive in both oxidizing and reducing atmospheres, enhancing its suitability for plasma, vacuum, and corrosive gas environments.


To explore our full range of solid silicon carbide components and discuss your project specifications, please visit the Veteksemicon product detail page or contact us for technical support and quotations.


Minangka Produsen lan supplier profesional Carbide Solid Solid ing China, kita duwe pabrik dhewe. Apa sampeyan mbutuhake layanan khusus kanggo nyukupi kabutuhan wilayah tartamtu utawa pengin tuku sing digawe lan awet sing digawe ing China, sampeyan bisa ninggalake pesen.
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