TAC COATS SINSER

Susceptor Coated Vetek Semikonduktor lanTac ditutupiCincinBisa bebarengan ing reaktor wutah epitiper Carbide Carbide Carbide

● Rintangan suhu dhuwur: IngLapisan tacSusceptor duwe resistensi suhu dhuwur, bisa tahan suhu sing ekstrem nganti 1500 ° C ingReaktor lpeWaca rangkeng-. Iki njamin peralatan lan komponen ora cacat utawa rusak sajrone operasi jangka panjang.

● stabilitas kimia: Susceptor lapisan tac nindakake kanthi apik ing lingkungan wutah karbida karbida karbida karbida, kanthi efektif nglindhungi komponen reaktor saka serangan kimia sing bisa ditindakake, mula luwih akeh ngladeni gesang.

● stabilitas termal: Penyusuhan lapisan tac duwe stabilitas termal sing apik, njaga morfologi permukaan lan kasar kanggo njamin keseragaman ing lapangan suhu ing reaktor sing bermutu saka lapisan silikxial caricon karbida.

● anti-kontaminasi: Lumahing ditutupi tac lancar lan tenaga kerja sing luwih unggul (suhu sing luwih unggul) bisa nyuda partikel akumulasi lan adsorpsi ing reaktor, nyegah lapisan epitoxial.

In summary, the TaC coated susceptor and ring play a critical protective role in the LPE silicon carbide epitaxial growth reactor, ensuring the long-term stable operation of the equipment and the high-quality growth of the epitaxial layers.