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Jalan Wangun, Street Ziyang, Wuyi County, Jinhua City, Provinsi Zhejiang, China
Oksidasi lan tawon bedhil digunakake ing macem-macem lapangan kayata piranti semikonduktor, piranti diskriminasi, piranti optoelektronik, sel solar ukuran gedhe, lan skala circuit integral. Dheweke digunakake kanggo proses kalebu panyebaran, oksidasi, annealing, alloying, lan gawe dosa saka wafers.
Vetek Semiconduktor minangka pabrikan utama sing duwe spesialisasi ing produksi grafit grafit kanthi dhuwur, silikon karbida lan karbida ing oksidasi lan tungku. Kita setya nyedhiyakake komponen tungku kanthi kualitas tinggi kanggo industri semikonduktor lan fotovolta, lan ing ngarep teknologi lapisan lumahing, kayata CVD-TAC, CVD-TAC, Pyrocarbon, lsp.
● Rintangan suhu dhuwur (nganti 1600 ℃)
● Konduktivitas termal lan stabilitas termal
● Rintangan karat kimia sing apik
● koefisien kurang ekspansi termal
● kekuatan lan kekerasan dhuwur
● Urip layanan sing dawa
Ing oksidasi lan tungku sing beda-beda, amarga ana suhu suhu sing dhuwur lan gas sing kudu mbutuhake bahan tahan suhu sing dhuwur lan karat (SIC) sing digunakake. Ing ngisor iki minangka komponen karbida umum silikon sing ditemokake ing tungku oksidasi lan tawon penyebaran:
● prau wafer
Boat prau silikon karbida yaiku wadhah sing digunakake kanggo nggawa wafers silikon, sing bisa nahan suhu sing dhuwur lan ora bakal reaksi karo wafers silikon.
● Tube tungku
Tube tungku yaiku komponen inti tungku panyebaran, digunakake kanggo ngrampungake silikon wafers lan ngontrol lingkungan reaksi. Tabung tungku karbida karbida duwe suhu suhu dhuwur lan kinerja tahan karat.
● piring baffle
Digunakake kanggo ngatur penyebaran udara lan distribusi suhu ing njero tungku
● Tube perlindungan thermocouple
Digunakake kanggo nglindhungi suhu kanggo ngukur thermocuples saka kontak langsung kanthi gas currosive.
● Paddle cantilever
Paddles carbide carbide carbide carbide tahan suhu lan suhu dhuwur, lan digunakake kanggo ngeterake kapal silikon utawa kapal kuarza sing nggawa wafers silikon menyang tabung tawon sing beda.
● injector gas
Digunakake kanggo ngenalake gas reaksi menyang tungku, kudu tahan suhu lan karat sing dhuwur.
● kapal prau
Carrier Boat Boat silikon kareta digunakake kanggo ndandani lan nyengkuyung wafers silikon, sing duwe kaluwihan kayata kekuatan sing dhuwur, resistance karat, lan stabilitas struktural sing apik.
● lawang tungku
Kelainan karbida utawa komponen bisa uga digunakake ing njero lawang tungku.
● Unsur pemanasan
Unsur pemanasan karbida karbida cocog kanggo suhu sing dhuwur, kekuwatan dhuwur, lan bisa cepet ngunggahake suhu nganti luwih saka 1000 ℃.
● Sic liner
Digunakake kanggo nglindhungi tembok batin tabung tungku, bisa mbantu nyuda energi panas lan tahan lingkungan sing kuat kayata suhu dhuwur lan tekanan dhuwur.
Shop high-performance Oxidation and Diffusion Furnace components at Veteksemicon—your trusted source for SiC-based thermal process solutions.
Veteksemicon supplies premium-grade silicon carbide (SiC) components designed specifically for oxidation and diffusion furnace systems in semiconductor manufacturing. These SiC parts exhibit excellent thermal shock resistance, high mechanical strength, and long-term dimensional stability in ultra-high-temperature and oxidizing environments. Ideal for process temperatures exceeding 1200°C, they are widely used in atmospheric and low-pressure diffusion systems, oxidation furnaces, and vertical thermal reactors.
Our product portfolio includes SiC cantilevers, boats, support rods, and tube liners, all engineered for precise wafer positioning and minimal particle contamination. The low thermal expansion coefficient of SiC helps maintain alignment across thermal cycles, while its chemical inertness ensures compatibility with O₂, N₂, H₂, and dopant gases. Whether for dry oxidation or dopant diffusion (e.g., phosphorus or boron), Veteksemicon’s diffusion furnace solutions enhance process stability, extend maintenance intervals, and support 200mm/300mm wafer formats.
For technical drawings, material datasheets, or quotation support, please visit Veteksemicon’s Oxidation and Diffusion Furnace product page or contact our application engineers.
+86-579-87223657
Jalan Wangun, Street Ziyang, Wuyi County, Jinhua City, Provinsi Zhejiang, China
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